Tetrachlorosilane
Cl4Si
tetrachlorosilane
Consulting for Tetrachlorosilane
Our experts support you with application, dosage, and compliance.
Identification
- CAS Number
- 10026-04-7
- EC Number
- 233-054-0
- UN Number
- 1818
- Index Number
- 014-002-00-4
- PubChem CID
- 24816
Physical-chemical properties
- Molecular Formula
- Cl4Si
- Molar Mass
- 169.90 g/mol
- IUPAC Name
- tetrachlorosilane
Chemical Identifiers
- InChI
- InChI=1S/Cl4Si/c1-5(2,3)4
- InChI Key
- FDNAPBUWERUEDA-UHFFFAOYSA-N
Overview
Tetrachlorosilane (CAS 10026-04-7) is an inorganic silicon compound with highly reactive chlorosilane properties used in semiconductor manufacturing and chemical synthesis. This colorless, fuming liquid represents one of the most important chlorosilane compounds in industrial chemistry, serving as a fundamental building block for silicon-based materials and processes. With its molecular formula Cl4Si and molecular weight of 169.9 g/mol, tetrachlorosilane exhibits exceptional reactivity with water, producing silicon dioxide and hydrogen chloride gas upon contact. This hydrolysis reaction makes it particularly valuable in controlled synthesis applications where precise silicon deposition is required. The compound presents specific safety considerations due to its corrosive nature and potential to cause skin and eye irritation, classified under GHS pictogram GHS07 with a Warning signal word. Its classification as STOT SE 3, Skin Irrit. 2, and Eye Irrit. 2 requires appropriate handling protocols and protective equipment during industrial use. Transportation falls under ADR Class 8, reflecting its corrosive properties. Primary industrial applications include semiconductor wafer cleaning and etching processes, where tetrachlorosilane's reactivity enables precise material removal and surface preparation. The compound also serves as a precursor in chemical vapor deposition (CVD) for producing high-purity silicon films and coatings. Additionally, it functions as an intermediate in synthesizing various organosilicon compounds, similar to how other reactive compounds like bromomethylbenzene serve as intermediates in organic synthesis pathways. OYSI maintains reliable supply chains for tetrachlorosilane, supporting European industrial customers with consistent availability and technical expertise for semiconductor, specialty chemical, and advanced materials applications.
Safety & Classification
STOT SE 3; Skin Irrit. 2; Eye Irrit. 2
GHS Pictograms
HHazard Statements (H-Statements)
Describe the nature and severity of the hazard
Classification according to CLP Regulation (EC) No 1272/2008. The complete list of hazard and precautionary statements can be found in the Safety Data Sheet (SDS).
First Aid Measures
Inhalation
Measures if vapours or dust are inhaled
First Aid Actions
- +P304IF INHALED:
- +P340Remove person to fresh air and keep comfortable for breathing.
- +P311Call a POISON CENTER/doctor.
Related hazard statements:
Skin Contact
Measures if substance contacts the skin
First Aid Actions
- +P302IF ON SKIN:
- +P352Wash with plenty of water.
- +P361Take off immediately all contaminated clothing.
- +P313Get medical advice/attention.
Related hazard statements:
Eye Contact
Measures if substance gets into the eyes
First Aid Actions
- +P305IF IN EYES:
- +P351Rinse cautiously with water for several minutes.
- +P338Remove contact lenses, if present and easy to do. Continue rinsing.
- +P313Get medical advice/attention.
Related hazard statements:
General Measures
Emergency 112 | Poison Control: +49 30 19240 (DE), +33 1 45 42 59 59 (FR), +31 30 274 88 88 (NL)
First aid measures are based on CLP classification and associated P-statements. They do not replace the Safety Data Sheet (SDS). In case of emergency, always consult the full SDS and a physician.
Transport (ADR)
| UN Number | 1818 |
| ADR Class | 8 |
| Packing Group | II |
| Tunnel Code | E |
| Proper Shipping Name | Siliciumtetrachlorid |
| Marine Pollutant | No |
Frequently Asked Questions
What is tetrachlorosilane?
Tetrachlorosilane is a chemical compound with the molecular formula Cl4Si and CAS number 10026-04-7. It belongs to the family of chlorosilanes and has a molecular weight of 169.9 g/mol. This silicon tetrachloride compound is classified as hazardous with warning pictogram GHS07, indicating potential skin and eye irritation as well as specific target organ toxicity. It serves as an important intermediate in silicon chemistry and semiconductor manufacturing processes.
What are the physicochemical properties of tetrachlorosilane?
Tetrachlorosilane is a colorless liquid at room temperature with a pungent, irritating odor. It has a molecular weight of 169.9 g/mol and reacts violently with water, producing hydrogen chloride gas and silicic acid. The compound is highly volatile and corrosive, making it sensitive to moisture. It is soluble in organic solvents but decomposes rapidly in aqueous environments, which is characteristic of chlorosilane compounds.
What is tetrachlorosilane used for?
Tetrachlorosilane is primarily used in the semiconductor industry for the production of high-purity silicon and silicon-based materials. It serves as a key precursor in chemical vapor deposition (CVD) processes for manufacturing silicon wafers and electronic components. Additionally, it is utilized in the synthesis of various organosilicon compounds, silicones, and as an intermediate in the production of optical fibers and specialty glass materials for advanced technological applications.
How to handle tetrachlorosilane safely?
Tetrachlorosilane requires careful handling with appropriate personal protective equipment including chemical-resistant gloves, safety goggles, and protective clothing. Work should be conducted in well-ventilated areas or under fume hoods to prevent inhalation of vapors. Avoid contact with skin, eyes, and mucous membranes as the compound causes irritation (Skin Irrit. 2; Eye Irrit. 2). Keep away from moisture and water to prevent violent reactions and hydrogen chloride formation.
How to store tetrachlorosilane correctly?
Tetrachlorosilane must be stored in a cool, dry place away from moisture, water, and incompatible materials. Use tightly sealed, corrosion-resistant containers in well-ventilated storage areas. Keep away from heat sources, ignition sources, and oxidizing agents. Storage areas should be equipped with appropriate ventilation systems and emergency response equipment. Ensure containers are properly labeled and stored according to local chemical storage regulations to prevent accidental exposure or reactions.
What to do in case of contact with tetrachlorosilane?
In case of skin contact with tetrachlorosilane, immediately remove contaminated clothing and rinse the affected area with plenty of water for at least 15 minutes. For eye contact, flush eyes thoroughly with clean water for at least 15 minutes and remove contact lenses if present. If inhaled, move the person to fresh air immediately. Seek medical attention promptly for all exposure incidents, as the compound can cause irritation and specific target organ toxicity.
How to dispose of tetrachlorosilane properly?
Tetrachlorosilane must be disposed of as hazardous waste through licensed waste management facilities. Never pour down drains or dispose of in regular waste streams due to its corrosive nature and potential environmental impact. Contact certified hazardous waste disposal companies for proper collection and treatment. Follow local and national regulations for chemical waste disposal, including proper labeling and documentation. Small quantities should be neutralized carefully by qualified personnel before disposal.
How to transport tetrachlorosilane?
Tetrachlorosilane is classified as ADR Class 8 (corrosive substances), Packing Group II, indicating significant transport hazards. It must be transported in approved UN-specification packaging with proper hazard labels and documentation. Vehicles must carry appropriate emergency equipment and drivers require ADR certification. The compound requires specific packaging instructions due to its corrosive nature and potential for generating harmful vapors during transport incidents.
Is tetrachlorosilane subject to specific regulations?
Tetrachlorosilane is subject to various chemical regulations including REACH registration requirements in Europe and CLP classification. It is not listed as a Substance of Very High Concern (SVHC), but its hazard classification (STOT SE 3; Skin Irrit. 2; Eye Irrit. 2) requires compliance with workplace safety standards. Users must follow proper risk assessment procedures, maintain safety data sheets, and implement appropriate risk management measures according to chemical safety regulations.
Where to buy tetrachlorosilane in Europe?
Tetrachlorosilane is available through OYSI, a European distributor specializing in technical chemicals. As an established chemical supplier, OYSI provides quality tetrachlorosilane to industrial customers across Europe with proper documentation and safety data sheets. Professional buyers can contact OYSI for product availability, technical specifications, and regulatory compliance support. The company ensures proper handling and delivery of hazardous chemicals according to European transport and safety regulations.
Services for Tetrachlorosilane
Order Tetrachlorosilane
Fast delivery across Europe
SDS Service
Request Safety Data Sheet for Tetrachlorosilane
Technical Consulting
Application advice for Tetrachlorosilane
REACH Safety Data Sheet
REACH Compliance Service
Digital Product Passport
EU-compliant product documentation
ADR Consulting for Tetrachlorosilane
Tetrachlorosilane is a dangerous good. We support you with labeling, packaging, and transport documentation.
Data Sources
Classification per CLP Regulation (EC) No 1272/2008. Data from ECHA and PubChem.