Tetrachlorosilane

Cl4Si

tetrachlorosilane

CAS10026-04-7
GHS07 Gefahrensymbol: Gesundheitsschädlich/Reizend – Ausrufezeichen
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Identification

CAS Number
10026-04-7
EC Number
233-054-0
UN Number
1818
Index Number
014-002-00-4
PubChem CID
24816

Physical-chemical properties

Molecular Formula
Cl4Si
Molar Mass
169.90 g/mol
IUPAC Name
tetrachlorosilane

Chemical Identifiers

InChI
InChI=1S/Cl4Si/c1-5(2,3)4
InChI Key
FDNAPBUWERUEDA-UHFFFAOYSA-N

Overview

Tetrachlorosilane (CAS 10026-04-7) is a silicon tetrachloride compound with high reactivity and corrosive properties used in semiconductor manufacturing and silicone production. This colorless, fuming liquid represents one of the most important silicon-containing chemicals in industrial applications. Tetrachlorosilane, also known by its IUPAC name tetrachlorosilane, exhibits exceptional reactivity with water, rapidly hydrolyzing to form silicic acid and hydrochloric acid. This characteristic reaction makes it both valuable for specific manufacturing processes and requiring careful handling protocols. The compound demonstrates significant chemical versatility in industrial synthesis, particularly where controlled silicon introduction is required. Unlike organic compounds such as 4-methylbenzenesulfonic acid which serve primarily as catalysts or intermediates, tetrachlorosilane functions as a direct silicon source in various chemical transformations. Its molecular structure (Cl4Si) provides four reactive chlorine sites, enabling multiple substitution reactions under controlled conditions. Safety considerations are paramount when handling tetrachlorosilane, as it carries GHS07 pictograms and ADR Class 8 classification due to its corrosive nature. The substance can cause skin and eye irritation (Skin Irrit. 2; Eye Irrit. 2) and may cause respiratory tract irritation (STOT SE 3), necessitating appropriate personal protective equipment and ventilation systems. Primary industrial applications include semiconductor wafer processing, where ultra-pure tetrachlorosilane serves as a silicon source for epitaxial growth, and silicone polymer manufacturing as a key intermediate. The compound also finds use in optical fiber production, where its high purity enables creation of low-loss glass materials. OYSI maintains reliable supplies of tetrachlorosilane to support European industrial customers requiring this essential silicon chemistry building block.

Safety & Classification

Warning
Classification:

STOT SE 3; Skin Irrit. 2; Eye Irrit. 2

HHazard Statements (H-Statements)

Describe the nature and severity of the hazard

H335

May cause respiratory irritation.

H315

Causes skin irritation.

H319

Causes serious eye irritation.

Classification according to CLP Regulation (EC) No 1272/2008. The complete list of hazard and precautionary statements can be found in the Safety Data Sheet (SDS).

First Aid Measures

Inhalation

Irritant

Measures if vapours or dust are inhaled

First Aid Actions

  • +P304IF INHALED:
  • +P340Remove person to fresh air and keep comfortable for breathing.
  • +P311Call a POISON CENTER/doctor.

Related hazard statements:

Skin Contact

Irritant

Measures if substance contacts the skin

First Aid Actions

  • +P302IF ON SKIN:
  • +P352Wash with plenty of water.
  • +P361Take off immediately all contaminated clothing.
  • +P313Get medical advice/attention.

Related hazard statements:

Eye Contact

Irritant

Measures if substance gets into the eyes

First Aid Actions

  • +P305IF IN EYES:
  • +P351Rinse cautiously with water for several minutes.
  • +P338Remove contact lenses, if present and easy to do. Continue rinsing.
  • +P313Get medical advice/attention.

Related hazard statements:

General Measures

Emergency 112 | Poison Control: +49 30 19240 (DE), +33 1 45 42 59 59 (FR), +31 30 274 88 88 (NL)

First aid measures are based on CLP classification and associated P-statements. They do not replace the Safety Data Sheet (SDS). In case of emergency, always consult the full SDS and a physician.

Transport (ADR)

UN Number1818
ADR Class8
Packing GroupII
Tunnel CodeE
Proper Shipping NameSiliciumtetrachlorid
Marine PollutantNo

Frequently Asked Questions

What is tetrachlorosilane?

Tetrachlorosilane is an inorganic chemical compound with the molecular formula Cl4Si and CAS number 10026-04-7. This silicon tetrachloride has a molecular weight of 169.9 g/mol and belongs to the family of silicon halides. It is classified as a hazardous substance with specific target organ toxicity, skin irritation, and eye irritation properties. The compound carries a Warning signal word and requires careful handling due to its corrosive nature and potential health effects.

What are the physicochemical properties of tetrachlorosilane?

Tetrachlorosilane is a colorless, fuming liquid at room temperature with a pungent, suffocating odor. The compound has a molecular weight of 169.9 g/mol and reacts violently with water, producing hydrogen chloride gas and silicic acid. It has a low boiling point and high vapor pressure, making it highly volatile. The substance is miscible with most organic solvents but decomposes in the presence of moisture, releasing corrosive hydrochloric acid vapors.

What is tetrachlorosilane used for?

Tetrachlorosilane is primarily used as a precursor in the production of high-purity silicon for semiconductor applications and solar panels. It serves as an intermediate in the manufacture of silicones, silicone polymers, and various organosilicon compounds. The chemical industry uses it for producing fumed silica, optical fibers, and specialty glass materials. Additionally, it finds applications in chemical vapor deposition processes and as a reagent in analytical chemistry for silicon-based material synthesis.

How to handle tetrachlorosilane safely?

Tetrachlorosilane requires strict safety precautions including use of chemical-resistant gloves, safety goggles, and protective clothing to prevent skin and eye contact. Work must be conducted in well-ventilated areas or under fume hoods due to its corrosive vapors. Respiratory protection is essential when handling larger quantities. Avoid contact with water and moisture, as this causes violent reactions. Emergency shower and eyewash stations should be readily accessible, and personnel must be trained in proper handling procedures.

How to store tetrachlorosilane correctly?

Tetrachlorosilane must be stored in tightly sealed, corrosion-resistant containers in a cool, dry, well-ventilated area away from moisture and water sources. Storage areas should be equipped with appropriate ventilation systems and spill containment measures. Keep away from incompatible materials such as alcohols, amines, and strong bases. Containers should be properly labeled and stored in secondary containment systems. Regular inspection of storage containers is necessary to detect any signs of corrosion or leakage.

What to do in case of contact with tetrachlorosilane?

Tetrachlorosilane contact requires immediate emergency response. For skin contact, immediately remove contaminated clothing and flush affected area with plenty of water for at least 15 minutes. In case of eye contact, rinse immediately with clean water for 15-20 minutes and seek medical attention promptly. If inhaled, move the person to fresh air and provide artificial respiration if breathing has stopped. Do not induce vomiting if ingested. Seek immediate medical attention in all cases of exposure.

How to dispose of tetrachlorosilane properly?

Tetrachlorosilane disposal must comply with local and national hazardous waste regulations. The substance cannot be disposed of in regular waste streams due to its corrosive and toxic properties. Arrange disposal through licensed hazardous waste contractors who can handle corrosive materials safely. Small quantities may be neutralized carefully by trained personnel using appropriate procedures, but this should only be done following proper safety protocols. Always consult local environmental authorities for specific disposal requirements.

How to transport tetrachlorosilane?

Tetrachlorosilane is classified under ADR Class 8 (corrosive substances) with Packing Group II, indicating moderate danger level. Transportation requires appropriate UN-specification packaging designed for corrosive liquids. Vehicles must carry proper hazard placards and emergency response information. Drivers need ADR training certification for handling corrosive materials. Shipments must include proper documentation, safety data sheets, and emergency contact information. Transportation should avoid extreme temperatures and ensure packages remain upright and secure during transit.

Is tetrachlorosilane subject to specific regulations?

Tetrachlorosilane is subject to various European regulations including REACH registration requirements and CLP classification standards. It is not currently listed as a Substance of Very High Concern (SVHC) under REACH. The substance must be classified with appropriate hazard pictograms (GHS07) and Warning signal words on packaging and safety data sheets. Industrial users must comply with occupational exposure limits and workplace safety regulations. Import and handling may require specific permits depending on quantities and intended use.

Where to buy tetrachlorosilane in Europe?

Tetrachlorosilane is available through OYSI, a specialized European distributor of technical chemicals serving industrial customers across Europe. As a professional chemical supplier, OYSI provides high-quality tetrachlorosilane with proper documentation, safety data sheets, and regulatory compliance support. The company offers reliable supply chains and technical expertise to ensure safe handling and transportation. Contact OYSI directly for availability, specifications, and delivery options tailored to your specific industrial requirements and location within Europe.

Data Sources

Classification per CLP Regulation (EC) No 1272/2008. Data from ECHA and PubChem.