Dichlorosilane

Cl2H2Si

dichlorosilane

CAS4109-96-0

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Identification

CAS Number
4109-96-0
EC Number
223-888-3
UN Number
2189
PubChem CID
61330

Physical-chemical properties

Molecular Formula
Cl2H2Si
Molar Mass
101.00 g/mol
IUPAC Name
dichlorosilane

Chemical Identifiers

InChI
InChI=1S/Cl2H2Si/c1-3-2/h3H2
InChI Key
MROCJMGDEKINLD-UHFFFAOYSA-N

Overview

Dichlorosilane (CAS 4109-96-0) is an inorganic silicon compound characterized by its reactive chlorosilane structure and significant industrial utility in semiconductor manufacturing. This colorless, fuming liquid represents one of the most important chlorosilane compounds in modern industrial chemistry. With the molecular formula Cl2H2Si and a molecular weight of 101 g/mol, dichlorosilane serves as a crucial intermediate in silicon-based chemical processes. The compound belongs to the chlorosilane family, which includes various silicon-chlorine compounds essential for producing high-purity silicon materials and organosilicon derivatives. Dichlorosilane exhibits high reactivity due to the presence of both silicon-chlorine and silicon-hydrogen bonds. The compound readily hydrolyzes in the presence of moisture, forming siloxane polymers and hydrogen chloride gas. This reactivity necessitates careful handling under controlled atmospheric conditions, typically requiring inert gas protection during storage and processing. Unlike simpler compounds such as nitrous oxide, dichlorosilane demands specialized equipment and safety protocols due to its corrosive nature and tendency to release toxic gases upon decomposition. The primary industrial applications of dichlorosilane center around semiconductor manufacturing, where it serves as a precursor for chemical vapor deposition processes used in silicon wafer production. Additionally, the compound finds use in the synthesis of specialized organosilicon polymers and as an intermediate in producing other chlorosilane derivatives. The electronics industry particularly values dichlorosilane for its role in creating high-purity silicon films essential for microelectronic devices. Given its classification under ADR Class 2 for transportation, dichlorosilane requires specialized logistics and handling expertise. OYSI provides reliable access to this critical chemical intermediate for European industrial customers requiring consistent quality and regulatory compliance.

Safety & Classification

No Hazard Classification

This substance is not classified as hazardous according to CLP Regulation (EC) No 1272/2008.

Transport (ADR)

UN Number2189
ADR Class2
Packing Group
Tunnel CodeB/D
Proper Shipping NameDichlorsilan, unter Druck verflüssigt
Marine PollutantNo

Frequently Asked Questions

What is dichlorosilane?

Dichlorosilane is an organosilicon compound with the molecular formula Cl2H2Si and CAS number 4109-96-0. This chemical compound has a molecular weight of 101 g/mol and belongs to the family of chlorosilanes. It serves as an important intermediate in silicon chemistry and semiconductor manufacturing processes. Dichlorosilane is characterized by its reactive nature due to the presence of both silicon-hydrogen and silicon-chlorine bonds, making it valuable for various industrial applications requiring silicon incorporation.

What are the physicochemical properties of dichlorosilane?

Dichlorosilane is a colorless gas at room temperature with a pungent, irritating odor. The compound is highly reactive with water, undergoing hydrolysis to form siloxanes and hydrogen chloride. It has a boiling point of approximately 8.2°C and a melting point around -122°C. Dichlorosilane is denser than air and exhibits high reactivity toward moisture and alcohols. The compound is flammable and can form explosive mixtures with air under certain conditions.

What is dichlorosilane used for?

Dichlorosilane is primarily used as a precursor in the production of high-purity silicon for semiconductor applications and solar cell manufacturing. It serves as an intermediate in chemical vapor deposition (CVD) processes for producing silicon films and coatings. The compound is also utilized in the synthesis of various organosilicon compounds and silicone polymers. Additionally, dichlorosilane finds applications in the preparation of silicon-based materials for electronics, optical components, and specialized industrial coatings requiring precise silicon deposition.

How to handle dichlorosilane safely?

Dichlorosilane requires careful handling due to its reactive and potentially hazardous nature. Personnel should wear appropriate personal protective equipment including chemical-resistant gloves, safety goggles, and respiratory protection when necessary. Work should be conducted in well-ventilated areas or under fume hoods to prevent inhalation exposure. Avoid contact with water, moisture, and incompatible materials. Use proper grounding techniques to prevent static discharge, and ensure all equipment is suitable for handling reactive gases. Emergency procedures should be readily available.

How to store dichlorosilane correctly?

Dichlorosilane should be stored in tightly sealed, dry containers away from moisture, water, and incompatible substances. Storage areas must be cool, well-ventilated, and protected from direct sunlight and heat sources. The compound should be kept separate from oxidizing agents, alcohols, and basic materials. Use appropriate gas cylinders or containers designed for reactive gases, and ensure proper labeling and inventory management. Regular inspection of storage containers for leaks or damage is essential for maintaining safe storage conditions.

What to do in case of contact with dichlorosilane?

Immediate action is required in case of dichlorosilane exposure. For skin contact, remove contaminated clothing and flush the affected area with plenty of water for at least 15 minutes. In case of eye contact, rinse thoroughly with water and seek immediate medical attention. If inhaled, move the person to fresh air and provide oxygen if breathing difficulties occur. For ingestion, do not induce vomiting and seek immediate medical care. Always consult a physician after any significant exposure and provide them with the safety data sheet.

How to dispose of dichlorosilane properly?

Dichlorosilane disposal must comply with local, national, and international waste regulations. The compound should never be released directly into the environment or disposed of through regular waste streams. Contact licensed hazardous waste disposal companies for proper treatment and disposal. Small quantities may be carefully neutralized under controlled conditions by trained personnel following established procedures. Always consult local environmental authorities and waste management regulations before disposal. Maintain proper documentation of all disposal activities for regulatory compliance.

How to transport dichlorosilane?

Dichlorosilane is classified under ADR Class 2 for transportation purposes, indicating it is a gas requiring special handling during transport. Proper packaging must comply with international dangerous goods regulations, including appropriate gas cylinders and marking requirements. Transportation should only be performed by qualified personnel familiar with hazardous materials handling. Vehicles must be properly placarded and equipped with emergency response information. Ensure proper documentation accompanies shipments and that transport routes comply with local restrictions for hazardous materials.

Is dichlorosilane subject to specific regulations?

Dichlorosilane is subject to various chemical regulations including REACH registration requirements in Europe for commercial use. The compound must comply with CLP (Classification, Labelling and Packaging) regulations for proper hazard communication. It is not currently listed as a Substance of Very High Concern (SVHC) under REACH. Users must ensure compliance with local workplace exposure limits and industrial safety regulations. Import/export may require permits or notifications depending on jurisdiction and intended use applications.

Where to buy dichlorosilane in Europe?

Dichlorosilane is available through specialized chemical distributors in Europe, including OYSI, which supplies high-quality chemicals to industrial customers across the European market. When sourcing dichlorosilane, ensure the supplier provides proper documentation, safety data sheets, and certificates of analysis. Consider factors such as purity requirements, packaging options, and delivery capabilities when selecting a supplier. OYSI offers reliable supply chains and technical support for customers requiring dichlorosilane for semiconductor, electronics, and specialty chemical applications throughout Europe.

Data Sources

Classification per CLP Regulation (EC) No 1272/2008. Data from ECHA and PubChem.